青州市中拓镀膜机械科技有限公司

 

中拓镀膜科技

磁控溅射镀膜机

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磁控溅射镀膜机




设备技术参数                     Equipment technical parameters
真空室材质                       Vacuum chamber material不锈钢、碳钢                                       Stainless steel, carbon steel
蒸镀方式                         Metalizing mode单面镀膜、双面镀膜                                 Single side coating, double side coating
蒸镀模式                         Metalizing model磁控溅射                                           Magnetron sputtering
有效镀宽                         Effective width of coating400mm-1700mm
最大卷径                         Max.rolling diameter500mm-1300mm
卷绕速度                         Wind speed1m/min ~15m/min(2m/min ~30m/min)
可镀材料                         Can be plated material铜、铬、钛、银等                                    Cu, Cr, Ti, Ag, etc
镀膜基材                         Coating substratePET(3.8U-300U)PI(15U-150U)铜、铝箔、无纺布、纸等各种卷材                                              PET (3.8 u-300u) PI (15u-150u) copper, aluminum foil, non-woven fabric, paper and other coils
常用真空抽气时间                 Commonly used vacuum extraction time清洁容器抽至8.5×10-3Pa≤30min                       Clean the container until 8.5×10-3pa ≤30min
极限真空抽气时间                 Limit vacuum time清洁空容器抽至5×10-4Pa≤24h                         Clean empty containers and pump until 5×10-4pa ≤24h
极限压力(清洁、空载)           Extreme pressure (clean, no load)7×10-4Pa
水冷辊直径                      Diameter of water-cooled rollφ500mm-φ1200mm
水冷辊冷冻工作温度               Water cooling roller freezing working temperature-25℃~80℃
离子源                          Ion source线性离子源                                          Linear ion source
靶体形式                        The target body form平面靶、圆柱靶                                      Plane target、 cylindrical target
磁控靶电源                      Magnetic target power supply直流、中频                                          Dc,if
磁控靶工作压力                  Magnetic target operating pressure2×10-1Pa
磁控靶工作气体                  Magnetically controlled target working gas氩气、氧气,纯度99.99%                               Ar, O2, 99.99% purity
磁控靶工作气体控制方式           Magnetic target working gas control mode质量流量控制器控制                                   Mass flow controller control
卷绕系统                        The winding system采用西门子变频恒张力全自动收放卷系统                                                                  Siemens variable frequency constant tension automatic winding and unwinding system is adopted
舒展系统                        Stretch system收卷放卷端各有一条360度可调舒展辊                                                                      There is a 360-degree adjustable stretch roll at each end of winding and unwinding
驱动电机                        Drive motor西门子电机                                           Siemens motor
气胀轴                          Inflatable shaft胀块式、键条式等                                     Bulk-type, key-bar type, etc
气胀轴直径                      Inflation axis diameter3″、 6″气胀轴                                      3 ", 6 "gas expansion axis
真空系统                         Vacuum systemφ400分子泵,速度3600升/秒                            Phi 400 molecular pump, speed 3600 L/S
ZJ2500罗茨泵,速度2500升/秒                           ZJ2500 roots pump, speed 2500 L/S
2H160滑阀泵,速度160升/秒                              2H160 slide valve pump, speed 160 L/S
冷暖交换机组                                          Heating and cooling exchange unit
深冷捕集器                                            Cryogenic trap
功率                              power90KW-200KW
电源                              The power supply380V  三相五线                                         380V   Three phase five wire


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产品详情

磁控溅射镀膜机




设备技术参数                     Equipment technical parameters
真空室材质                       Vacuum chamber material不锈钢、碳钢                                       Stainless steel, carbon steel
蒸镀方式                         Metalizing mode单面镀膜、双面镀膜                                 Single side coating, double side coating
蒸镀模式                         Metalizing model磁控溅射                                           Magnetron sputtering
有效镀宽                         Effective width of coating400mm-1700mm
最大卷径                         Max.rolling diameter500mm-1300mm
卷绕速度                         Wind speed1m/min ~15m/min(2m/min ~30m/min)
可镀材料                         Can be plated material铜、铬、钛、银等                                    Cu, Cr, Ti, Ag, etc
镀膜基材                         Coating substratePET(3.8U-300U)PI(15U-150U)铜、铝箔、无纺布、纸等各种卷材                                              PET (3.8 u-300u) PI (15u-150u) copper, aluminum foil, non-woven fabric, paper and other coils
常用真空抽气时间                 Commonly used vacuum extraction time清洁容器抽至8.5×10-3Pa≤30min                       Clean the container until 8.5×10-3pa ≤30min
极限真空抽气时间                 Limit vacuum time清洁空容器抽至5×10-4Pa≤24h                         Clean empty containers and pump until 5×10-4pa ≤24h
极限压力(清洁、空载)           Extreme pressure (clean, no load)7×10-4Pa
水冷辊直径                      Diameter of water-cooled rollφ500mm-φ1200mm
水冷辊冷冻工作温度               Water cooling roller freezing working temperature-25℃~80℃
离子源                          Ion source线性离子源                                          Linear ion source
靶体形式                        The target body form平面靶、圆柱靶                                      Plane target、 cylindrical target
磁控靶电源                      Magnetic target power supply直流、中频                                          Dc,if
磁控靶工作压力                  Magnetic target operating pressure2×10-1Pa
磁控靶工作气体                  Magnetically controlled target working gas氩气、氧气,纯度99.99%                               Ar, O2, 99.99% purity
磁控靶工作气体控制方式           Magnetic target working gas control mode质量流量控制器控制                                   Mass flow controller control
卷绕系统                        The winding system采用西门子变频恒张力全自动收放卷系统                                                                  Siemens variable frequency constant tension automatic winding and unwinding system is adopted
舒展系统                        Stretch system收卷放卷端各有一条360度可调舒展辊                                                                      There is a 360-degree adjustable stretch roll at each end of winding and unwinding
驱动电机                        Drive motor西门子电机                                           Siemens motor
气胀轴                          Inflatable shaft胀块式、键条式等                                     Bulk-type, key-bar type, etc
气胀轴直径                      Inflation axis diameter3″、 6″气胀轴                                      3 ", 6 "gas expansion axis
真空系统                         Vacuum systemφ400分子泵,速度3600升/秒                            Phi 400 molecular pump, speed 3600 L/S
ZJ2500罗茨泵,速度2500升/秒                           ZJ2500 roots pump, speed 2500 L/S
2H160滑阀泵,速度160升/秒                              2H160 slide valve pump, speed 160 L/S
冷暖交换机组                                          Heating and cooling exchange unit
深冷捕集器                                            Cryogenic trap
功率                              power90KW-200KW
电源                              The power supply380V  三相五线                                         380V   Three phase five wire


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